Purpose: non-directional deposition of a range of metals (single target)
Location: Upper East Grey Area
Material systems: Approved target materials – Ti, Au, Pt, Mo. Other materials by prior approval.
Scale/volume: Single wafers up to 50mm diameter
Specifications/resolution: Single target diameter 100mm; Gases available: O2, Ar; 10-300W rf power; 10-300W DC power