Location | UNSW – West Lab (Grey Area) |
Sample type | Silicon Only – Si-MOS Compatible |
Sample size | Up to 4” wafer |
Material available | Ti, Al, Pt and Pd |
Thickness range | 1nm to 500nm |
Option | Plasma clean capability by Ar sputtering |
Location | UNSW – West Lab (Grey Area) |
Sample type | Silicon Only – Si-MOS Compatible |
Sample size | Up to 4” wafer |
Material available | Ti, Al, Pt and Pd |
Thickness range | 1nm to 500nm |
Option | Plasma clean capability by Ar sputtering |