Location	UNSW – West Lab (Grey Area)
Sputter gases	Ar, N2, O2
Target materials (3” targets)	Ti, Al, Cr, Au, Cu, W, Nb, Ag, Si, ITO, Si3N4, SiO2, TiO2, ZnO
RF power	600W max
	2000W max
Chamber heating	Room Temp to 400
Max sample size	6”
Base pressure	Mid 10-8 mtorr