| Location | UTS |
| Description | Ion Beam Etcher, up to 600 eV impact energy |
| Wafer size | TBC |
| Gas available | Ar, O2 |
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| Location | UTS |
| Description | Ion Beam Etcher, up to 600 eV impact energy |
| Wafer size | TBC |
| Gas available | Ar, O2 |