| Location | UTS |
| Description | High-vacuum PVD tool with a 6-pocket electron-beam for evaporating metals and dielectrics, allowing high-purity thin-film coatings |
| Wafer size | Up to 150 mm |
University: UTS
Thermo G2 Phenom Bench Top SEM
| Location | UTS |
| Description | high resolution FEG benchtop SEM for ultra-fast sample loading and high quality imaging |
| Wafer size | TBC |
Seki/Astex MW-CVD diamond growth
| Location | UTS |
| Description | 1000W microwave plasma CVD system for diamond growth, primarily used for poly diamond films containing NV centres. |
| Wafer size | TBC |
| Gas available | TBC |
IntlVac nanoquest II Ion Beam Etcher
| Location | UTS |
| Description | Ion Beam Etcher, up to 600 eV impact energy |
| Wafer size | TBC |
| Gas available | Ar, O2 |
Trion Phantom, 600W ICP
| Location | UTS |
| Description | 600W ICP and CCP power |
| Wafer size | 150 mm |
| Gas available | F2, Ar and O2 |
