ANFF EAST (Lower Lab)


[table]
Tools,Status,Comments
Spinner, online,
Ultrasonic Bath, online,
Ovens and Hotplates, online,
XL30, online,
Sirion, offline, intermittent NPGS PC issue + stage movement issue
AFM, online, optical zoom not working
Dekak 3030, online,
O2 plasma asher, online, intermittent cooling water issue
Lesker thermal, online,
Edwards Evaporator (p type), online,
SET Evaporator (Edwards), online,
Dicing Saw, online,
[/table]



ANFF EAST (Upper Lab)


[table]
Tools,Status,Comments
Clean Anneal Furnace, online,
GP Anneal Furnace, online,
Boron Diffusion Furnace, online,
Phosphorus Diffusion Furnace, online,
Udox Ultra-Clean Furnace, online,
Clean Si Oxidation Furnace, online,
Infra-Red Backside Aligner, online,
Quintel Q6000 Aligner, online, pressure contact mode only
Dektak 2A, online,
Jiplec RTA, online,
PDMS station, online,
Edwards Sputter, online,
Hollow-Cathode RIE, online,
Hollow-Cathode PECVD, online,
Oxford RIE, online,
Oxford PECVD, offline, pump issue
[/table]



ANFF West Lab


[table]
Tools,Status,Comments
RaithTWO Large Area EBL, online,
Spinner, online,
Dektak 150, online,
Mask Aligner MA6, online,
ULVAC GaAs Annealing Furnace, online,
GP ULVAC Annealing Furnace, online,
Millatron,offline, until further notice
Barrel Plasma Asher, online,
ALD System, online,
Muffle Furnace, online,
ICP Tool, online,
Au Ball Bonder K&S, online,
Al Wedge Bonder K&S-4523, online,
Au Ball Bonder (Digital) 4524A, online,
Karl Suiss Wafer Scriber, online,
Lesker E-Beam Evap PVD75 – GP, online, intermittent cooling water issue
Lesker E-Beam Evap PVD75 – Si – with RF Plasma, online,
Sputterer, online,
Ellipsometer, online,
Old Probe Station, online,
Cascade Probe Station, online,
[/table]



ANFF South Lab


[table]
Tools,Status,Comments
Veeco MBE Tool, online,
Future MBE Tool, online,
Future Ion Implanter, online,
Laser-MBE Cleaning Station, online,
Pascal Laser-MBE Chamber A (Clean Process), online,
Pascal laser-MBE Camera & Software, online,
Pascal Laser-MBE Chamber B, online
[/table]



Last updated: March 11, 2016 at 1:46 pm