The Research & Prototype Foundry at the University of Sydney invites you to attend a FREE one-day workshop that focuses on direct write lithography technologies, including electron, photon, and ion beam lithography. This workshop is the first of its kind in Australia and is a joint collaboration between ANFF and Microscopy Australia.

The program features technical experts and equipment manufacturers to introduce a broad spectrum of state-of-the-art lithography capabilities and case studies. The event also offers plenty of opportunities for participants to share and exchange fabrication knowledge in dedicated parallel group sessions.

Immediately following the workshop, participants can choose to stay on for either a two-day training course on GenISys Beamer, a software package that targets electron beam lithography users, or a half-day practical introduction to direct write photolithography in our world-class cleanroom.

Program details, including travel funding, will be released closer to the date of the workshop. Catering will be provided


Location and Dates:

Seminar Room LG17, St Paul’s College, University of Sydney
4 Dec, 9am to 5pm – Direct Write Lithography Workshop
5-6 Dec, 9am to 5pm – Beamer Training
6 Dec, 9am to 1pm – Direct Write Photolithography Practical


Organizers:

ANFF – Jason Hwang, Research & Prototype Foundry
University of Sydney, jason.hwang@sydney.edu.au
Microscopy Australia – Elliot Cheng, Centre for Microscopy & Microanalysis, University of Queensland, h.cheng6@uq.edu.au


Limited Seats Available – RSVP now [Link]