Location	UNSW – West Lab (White Area)
Measurement Capability	Two-dimensional surface profile measurements; Optional three-dimensional measurement/analyses
Sample X/Y Stage	Manual 100 mm (4 in.) X/Y, manual leveling; Motorized 150 mm (6 in.) X/Y, manual leveling
Data Points Per Scan	120,000 maximum
Max. Sample Thickness	50 mm
Step Height Repeatability	4Å, 1 sigma on steps ≤1 μm (30 scans using a 12.5 μm stylus)
Vertical Range & Resolution	1 mm, 1Å (@ 6.55 μm range)