Location | UNSW – Upper East Lab (Grey Area) |
Tube size | 5” tube |
Wafer size | 2” up to 4” wafers |
Gasses | N2, O2 |
Temperature range | 400 – 1100C |
Restrictions | Boron and phosphorus doped Si only |
Location | UNSW – Upper East Lab (Grey Area) |
Tube size | 5” tube |
Wafer size | 2” up to 4” wafers |
Gasses | N2, O2 |
Temperature range | 400 – 1100C |
Restrictions | Boron and phosphorus doped Si only |