Purpose: optical device characterisation
Location: West Grey Area
Material systems: Most hard materials.
Scale/volume: Single wafer up to 300mm diameter.
Specifications/resolution: 210nm to1000nm (485 wavelengths); WVase software
Purpose: optical device characterisation
Location: West Grey Area
Material systems: Most hard materials.
Scale/volume: Single wafer up to 300mm diameter.
Specifications/resolution: 210nm to1000nm (485 wavelengths); WVase software