Location | UNSW – West Lab (Grey Area) |
Modes | Spectral ellipsometry, transmission measurements |
Wavelength range | 200 – 1000nm |
Spot size | 3x3mm |
Stage | No scanning |
Wafer size | Small chips up to 6” |
Software | WASE, Complete EASE |
Location | UNSW – West Lab (Grey Area) |
Modes | Spectral ellipsometry, transmission measurements |
Wavelength range | 200 – 1000nm |
Spot size | 3x3mm |
Stage | No scanning |
Wafer size | Small chips up to 6” |
Software | WASE, Complete EASE |