Location | UNSW – West Lab (Grey Area) |
Sample type | ALL (but contamination or hazardous ones) |
Sample size | Up to 6” wafer |
Material available | Metals: Ag, Al, Au, Co, Cr, Cu, Fe, Ge, Ir, Nb, Ni, NiFe, Pd, Pt, Si, Sn, Ti
Oxides: Al2O3, CeO2, Fe2O3, In2O3, SiO2, TiO2, WO3 Other materials by prior approval |
Thickness range | 1nm to 500nm (Thicker layer on request) |