Location | UNSW – Lower East Lab (White Area) |
Thin film material | Ge, Ni, Ti, Au, AuGe, PdAu, Cr, Al, Co |
Base pressure | 9e-7 mbar |
Sample size | Up to 3 inch in diameter |
Rotation | Angled evaporation with rotation |
Location | UNSW – Lower East Lab (White Area) |
Thin film material | Ge, Ni, Ti, Au, AuGe, PdAu, Cr, Al, Co |
Base pressure | 9e-7 mbar |
Sample size | Up to 3 inch in diameter |
Rotation | Angled evaporation with rotation |