Location | UNSW – Upper East Lab (Grey Area) |
Materials | SiO2, SiN, a-Si:H |
Temperature range | 100 – 300C |
Wafer size | Small chips up to 6” |
Gasses | SiH4, NH3, N2O, N2, Ar, CF4 |
Restrictions | no metals |
Location | UNSW – Upper East Lab (Grey Area) |
Materials | SiO2, SiN, a-Si:H |
Temperature range | 100 – 300C |
Wafer size | Small chips up to 6” |
Gasses | SiH4, NH3, N2O, N2, Ar, CF4 |
Restrictions | no metals |