Purpose: deposition of SiO2, a-Si, SixOyFz, doped SiO2

Location: Upper East Grey Area

Process gases: CF4, N2O, Ar, N2, SiH4, NH3

Deposition materials: SiO2, a-SI, SixOyFz, phosphorus-doped SiO2, boron-doped SiO2, germane-doped SiO2

Approved substrate materials: Si, SiO2, Si3N4, sapphire, glass

Scale/volume:

Specifications/resolution: