Purpose	The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness
Location	Metrology Bay, RPF Cleanroom
Scale / volume	Can accommodate up to 150mm wafers
Specs / resolution	This tool is generally used for measuring 2D profiles and has a 0.1nm vertical resolution
	* Not an ANFF-supported tool; access is available – refer to Access Fees schedule